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29Si and 30Si enrichment by IR MPD of Si2F6

✍ Scribed by M. Kamioka; S. Arai; Y. Ishikawa; S. Isomura; N. Takamiya

Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
256 KB
Volume
119
Category
Article
ISSN
0009-2614

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✦ Synopsis

Infrared muhiple-phomn decomposition of SI,F, ha been srudwd ns a function of irrJdianon \rataumbsr u\nng n collimated pulsed barn from n CO, TEA laser. The main dscompoG[ion producl SIF, U.IS found ICI be rnrlched wi[h '%I and -wS~. For example. SiF, conrained 6% '%I and 46% wS~ in the lrradlallon or 2 Torr narural S1?Fh urlh the lawr radiation dt 949.43 cm-' and 0 36 J cm-'_

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