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Isotopic exchange of cyclohexane with deuterium on vaporized germanium and silicon films

✍ Scribed by B. S. Gubkov; A. A. Balandin; E. P. Savin

Book ID
112419739
Publisher
Springer
Year
1965
Tongue
English
Weight
66 KB
Volume
14
Category
Article
ISSN
1573-9171

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## Abstract Diamond films were grown by hot filament chemical vapor deposition (HF CVD) technique using isotopic gas mixtures: CH~4~ + H~2~ and CD~4~ + D~2~ with a constant ratio of 1%:99%. The influence of isotopic exchange on the growth kinetics and film properties was investigated. The microstru