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Isotopic analysis of metallic and coated microparticles by laser ablation time-of-flight mass spectrometry (LA-TOF-MS)

✍ Scribed by Inhee Choi; Kyuseok Song; Yong Joon Park; Jong-Yun Kim; Hee-Soo Yoo


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
758 KB
Volume
95
Category
Article
ISSN
0026-265X

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Laser ablation inductively coupled plasma mass spectrometry LA-ICP-MS was used for profiling patterned thin metal layers on a polymerrsilicon substrate. The parameters of the laser and ICP-MS operating conditions have been studied and optimized for this purpose. A new laser ablation chamber was desi