Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis

✍ Scribed by S. Giangrandi; B. Brijs; T. Sajavaara; H. Bender; F. Iacopi; A. Vantomme; W. Vandervorst

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 222 KB
• Volume: 249
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.03.111