Irradiation defects and the electrical quality of ion implanted silicon : D. E. Davies and S. Roosild. Solid St. Electron.14 (1971), p. 975

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 118 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90688-9