Iron distribution in the implanted silicon under the action of high-power pulsed ion and laser beams

✍ Scribed by R. Bayazitov; R. Batalov; R. Nurutdinov; V. Shustov; P. Gaiduk; I. Dézsi; E. Kótai

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 162 KB
• Volume: 240
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.06.120