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IR-study of a-SiCx:H and a-SiCxNy:H films for c-Si surface passivation

✍ Scribed by M. Vetter; I. Martı́n; A. Orpella; J. Puigdollers; C. Voz; R. Alcubilla


Book ID
113936489
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
244 KB
Volume
451-452
Category
Article
ISSN
0040-6090

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