IR laser induced chemical vapour deposition of carbonaceous phases from 3-butyn-2-one

✍ Scribed by V. Dřínek; M. Urbanová; Z. Bastl; I. Gregora; V. Vorlíček; J. Šubrt; J. Pola

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 343 KB
• Volume: 36
• Category: Article
• ISSN: 0008-6223
• DOI: 10.1016/s0008-6223(98)00030-x

✦ Synopsis

laser induced decomposition of 3-butyn-2-one in the gas phase results in the deposition of carbonaceous films composed of a graphitic and monohydrogenated carbon, in which H is dominantly bonded to sp3 sites. The films incorporate oxygen in superficial layers. The technique is suitable for preparation of thin C-based films at low substrate temperatures.