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IR characterization of thermal SiO2 layers

✍ Scribed by Yu.A. Pusep; A.H. Milekhin; L.L. Vasiljeva

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 160 KB
Volume: 209
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90671-w

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