IQE's AGM reflects market conditions
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 183 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0961-1290
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β¦ Synopsis
Unaxis Wafer Processing has launched two production tools, the Versaline and the LLS EVO II. Built on a decade of dry etching system experience, Versaline is a modular system that enables etching and deposition technologies. Its ICP, RIE, PECVD and PVD modules provide solutions for applications such as LEDs, HBTs, HEMTs and MEMS. LLS EVO II is a batch sputtering system, with five sources, each configurable for sputtering options including DC, RF, RF/DC, pulsed DC, and co-sputtering.
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