IQE's AGM reflects market conditions
๐
Article
๐
2004
๐
Elsevier Science
๐
English
โ 183 KB
Unaxis Wafer Processing has launched two production tools, the Versaline and the LLS EVO II. Built on a decade of dry etching system experience, Versaline is a modular system that enables etching and deposition technologies. Its ICP, RIE, PECVD and PVD modules provide solutions for applications such