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Ionized metal flux fraction measurements in HiPIMS discharges

✍ Scribed by Poolcharuansin, P; Bowes, M; Petty, T J; Bradley, J W

Book ID: 120573469
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 258 KB
Volume: 45
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/45/32/322001

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