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Ionization of Al recoiled and sputtered from Al(100)

✍ Scribed by Chen, X.; Sroubek, Z.; Yarmoff, J. A.

Book ID
126928852
Publisher
The American Physical Society
Year
2005
Tongue
English
Weight
133 KB
Volume
71
Category
Article
ISSN
1098-0121

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The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110>