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Ion sputter etching of ZnO:Ga thin film surfaces

✍ Scribed by S. Flickyngerova; M. Netrvalova; I. Novotny; J. Bruncko; P. Gaspierik; P. Sutta; V. Tvarozek

Book ID: 113940865
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 455 KB
Volume: 86
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2011.07.030

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