✦ LIBER ✦

Ion source with plasma cathode for ion assisted deposition

✍ Scribed by T. Shiono; T. Shibuya; Y. Harano; E. Yabe; K. Takayama

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Broad beam cold cathode ion source for a

✍ Yan Yixin 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 226 KB

Ion-assisted deposition with a new plasm

✍ K. Matl; W. Klug; A. Zöller 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 433 KB

Oxygen ion source with plasma cathode

✍ E. Yabe; K. Takahashi; K. Takagi; K. Takayama 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 299 KB

Plasma cathode oxygen ion source

✍ Takehisa Shibuya; Shizuyo Hashimoto; Eiji Yabe; Kazuo Takayama 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 454 KB

Plasma compression type hollow cathode i

✍ A. Tonegawa; T. Shimoyama; E. Yabe; K. Takayama; K. Takagi; R. Fukui; R. Kikuchi 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 165 KB

Ion-emission properties of a plasma in a

✍ N. V. Gavrilov; A. S. Kamenetskikh 📂 Article 📅 2004 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 43 KB