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Broad beam cold cathode ion source for an ion assisted deposition

โœ Scribed by Yan Yixin


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
226 KB
Volume
42
Category
Article
ISSN
0042-207X

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โœ D. L. Swingler ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 370 KB

A method involving cathodic sputtering and post-ionization in the electronflux of a Penning discharge is described for the analysis of metals.