๐”– Bobbio Scriptorium
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Ion microscopy using magnifying ion TRANSPORT systems and position sensitive detectors

โœ Scribed by S.S. Klein; P.H.A. Mutsaers

Book ID
113278842
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
579 KB
Volume
30
Category
Article
ISSN
0168-583X

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At the INFN Legnaro Laboratories (Padova, Italy), an ion electron emission microscope dedicated to the study of radiation-induced damage in microelectronic devices has been recently installed. It is used to recognize, with micrometric resolution, the impact point of every single ion into the target.