Ion microprobe system combined with scanning electron microscope for high precision aiming

✍ Scribed by I. Ohdomari; M. Sugimori; M. Koh; K. Noritake; Y. Takiguchi; H. Shimizu; R. Tanaka; T. Kamiya; N. Utsunomiya; E. Minehara

• Book ID: 113282621
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 699 KB
• Volume: 72
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(92)95139-i