Ion irradiation through SiO2/Si interfaces: Non-conventional fabrication of Si nanocrystals for memory applications

✍ Scribed by B. Schmidt; K.-H. Heinig; L. Röntzsch; T. Müller; K.-H. Stegemann; E. Votintseva

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 144 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.011