Ion irradiation induced spontaneous hypersonic long-range stimulation of silicon nitride synthesis in silicon

✍ Scribed by E. S. Demidov; V. V. Karzanov; K. A. Markov; V. V. Sdobnyakov

• Book ID: 110128249
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 347 KB
• Volume: 93
• Category: Article
• ISSN: 1063-7761
• DOI: 10.1134/1.1410600