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Ion-induced topography, depth resolution, and ion yield during secondary ion mass spectrometry depth profiling of a GaAs/AlGaAs superlattice: Effects of sample rotation

✍ Scribed by Cirlin, Eun-Hee

Book ID: 126835203
Publisher: AVS (American Vacuum Society)
Year: 1991
Tongue: English
Weight: 910 KB
Volume: 9
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.577634

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