Ion-induced electron emission as a means of studying energy- and angle-dependent compositional changes of solids bombarded with reactive ions: II. Nitrogen bombardment of silicon

✍ Scribed by Y. Kataoka; K. Wittmaack

• Book ID: 117219301
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 366 KB
• Volume: 424
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(99)00100-4