Ion-induced electron emission as a means of studying energy- and angle-dependent compositional changes of solids bombarded with reactive ions: I. Oxygen bombardment of silicon

✍ Scribed by K. Wittmaack

• Book ID: 117219023
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 362 KB
• Volume: 419
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(98)00803-6