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Ion implanted MOSFET's with very short channel lengths

โœ Scribed by Dennard, R. H.; Gaensslen, F. H.; Yu, H. N.; Rideout, V. L.; Bassous, E.; LeBlanc, A.


Book ID
114586580
Publisher
Institute of Electrical and Electronics Engineers
Year
2007
Weight
570 KB
Volume
12
Category
Article
ISSN
1098-4232

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