Ion implantation of boron into silicon by use of the boron cathodic-arc plasma generator: First results

✍ Scribed by J.M. Williams; C.C. Klepper; R.C. Hazelton

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 290 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.05.004