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Ion implantation into fused quartz for integrated optical circuits

✍ Scribed by R.Th. Kersten; H. Boroffka

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 294 KB
Volume: 17
Category: Article
ISSN: 0030-4018
DOI: 10.1016/0030-4018(76)90193-0

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