Ion implantation for GaAs field effect transistors and integrated circuits : M. Berth and C. Venger. Acta Electron.23 (1) 23 (1980)

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 52 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(81)90235-3