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Ion-Implantation-Induced Damage Characteristics Within AlN and Si for GaN-on-Si Epitaxy

✍ Scribed by Jeffrey M. Leathersich, Mihir Tungare, Xiaojun Weng…

Book ID: 120946296
Publisher: Springer US
Year: 2013
Tongue: English
Weight: 235 KB
Volume: 42
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-013-2491-5

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