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Ion implantation. I. Elements of the theory of ranges: A Golanski, Nukleonika, 18 (8), 1973, 335–350 (in Polish)

Publisher: Elsevier Science
Year: 1975
Tongue: English
Weight: 301 KB
Volume: 25
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(75)91454-2

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Ion implantation. II. Investigation of distribution of effective ranges of phosphorus ions implanted into single crystal silicon: A Golanski and R Dybczynski, Nukleonika, 18 (8), 1973, 351–360 (in Polish)

📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 162 KB