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Ion implantation effects in single crystal Si investigated by Raman spectroscopy

✍ Scribed by T.A. Harriman; D.A. Lucca; J.-K. Lee; M.J. Klopfstein; K. Herrmann; M. Nastasi


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
329 KB
Volume
267
Category
Article
ISSN
0168-583X

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