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Ion-implantation doping of strained-layer superlattices

โœ Scribed by David R. Myers


Book ID
113277022
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
577 KB
Volume
10-11
Category
Article
ISSN
0168-583X

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## Abstract GaAs doping superlattices were implanted with 0.5 MeV hydrogen ions at doses ranging from 10^12^ to 10^16^ cm^โ€“2^. This gradually modified their optical characteristics from superlattice behaviour to something resembling the bulk material and beyond. Ellipsometry and near infrared refle