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Ion Implantation as a Tool to Control Properties of Amorphous Hydrogenated Silicon

✍ Scribed by Vavilov, V. S. ;Akimchenko, I. P. ;Krasnopevtsev, V. V.

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 494 KB
Volume: 94
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210940142

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