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Ion implantation and annealing of Fe for semi-insulating layers formation in InP

โœ Scribed by A. Gasparotto; A. Carnera; G. Arzenton; M. Tromby; S. Pellegrino; F. Vidimari; M. Caldironi


Book ID
113283489
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
281 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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