An optimal annealing technique for ohmic contacts to ion-implanted n-layers in semi-insulating indium phosphide

✍ Scribed by K.P. Pande; E. Martin; D. Gutierrez; O. Aina

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 658 KB
• Volume: 30
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(87)90180-8