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Ion enhanced gas-surface reactions: A kinetic model for the etching mechanism

✍ Scribed by U. Gerlach-Meyer

Book ID
118983859
Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
610 KB
Volume
103
Category
Article
ISSN
0039-6028

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## Abstract We propose a new method for constructing kinetic response surfaces used in the development and optimization of gas‐phase and surface reaction kinetic models. The method, termed as the sensitivity analysis based (SAB) method, is based on a multivariate Taylor expansion of model response