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Ion enhanced gas-surface reactions: A kinetic model for the etching mechanism

✍ Scribed by U. Gerlach-Meyer

Book ID: 104190783
Publisher: Elsevier Science
Year: 1981
Weight: 71 KB
Volume: 103
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(81)90651-4

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