Ion energy distribution at an r.f.-biased electrode in an inductively coupled plasma affected by collisions in a sheath

✍ Scribed by N Mizutani; T Hayashi

• Book ID: 111714471
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 325 KB
• Volume: 374
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(00)01148-2