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Ion bombardment induced compositional changes in GaP and InP surfaces

✍ Scribed by W. Yu; J.L. Sullivan; S.O. Saied; G.A.C. Jones


Book ID
114169539
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
131 KB
Volume
135
Category
Article
ISSN
0168-583X

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## Abstract The previously reported^1,2^ effect of low‐energy (several keV) ion bombardment on the surface topography of InP was investigated by scanning transmission electron microscopy. Convergent beam electron diffraction patterns of the surface growth β€˜cones’ induced by argon ion bombardment of