Ion bombardment effects on elemental incorporation probabilities during sputter deposition of GaSb and InSb

• Book ID: 104265272
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 322 KB
• Volume: 30
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(80)80559-8