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The effect of substrate temperature on oxygen absorption during simultaneous ion bombardment and Ag deposition on Si

✍ Scribed by A Mickus; A Galdikas; L Pranevičus; S Tamulevičus


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
475 KB
Volume
47
Category
Article
ISSN
0042-207X

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On the segregation of Ca at SiO2/Si inte
✍ Deenapanray, Prakash N. K.; Petravic, Mladen 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 128 KB

Segregation of Ca in Si has been studied using SIMS and RBS. Pronounced Ca profile broadening is observed during SIMS measurements with oxygen ions under bombardment conditions, yielding the formation of a stoichiometric oxide layer at the surface. Additional profiling through the SiO 2 /Si interfac