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Ion beam synthesis and characterization of Ge nanoparticles in SiO2

✍ Scribed by U.V. Desnica; M. Buljan; P. Dubcek; Z. Siketic; I. Bogdanovic Radovic; S. Bernstorff; U. Serincan; R. Turan

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
247 KB
Volume
249
Category
Article
ISSN
0168-583X

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Using atom beam co-sputtering of SiO 2 , Ge and Si targets, composite films containing Si, Ge and SiO x at different compositions were prepared and annealed at different temperatures . The influence of annealing temperatures on phase formation in the composite films was studied. The films were chara