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Ion beam synthesis and carrier dynamics of ZnO nanoparticles embedded in a SiO2matrix

✍ Scribed by B. Pandey, P. R. Poudel, A. K. Singh, A. Neogi, D. L. Weathers

Book ID: 120782755
Publisher: Springer
Year: 2013
Tongue: English
Weight: 973 KB
Volume: 112
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-013-7692-5

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## Abstract We propose an original approach called “stencil‐masked ion implantation process” to perform a spatially localized synthesis of a limited number of Si nanoparticles (nps) within a thin SiO~2~ layer. This process consists in implanting silicon ions at ultra‐low energy through a stencil ma