Ion-beam sculpting at nanometre length scales

✍ Scribed by Li, Jiali; Stein, Derek; McMullan, Ciaran; Branton, Daniel; Aziz, Michael J.; Golovchenko, Jene A.

• Book ID: 109775233
• Publisher: Nature Publishing Group
• Year: 2001
• Tongue: English
• Weight: 661 KB
• Volume: 412
• Category: Article
• ISSN: 0028-0836
• DOI: 10.1038/35084037