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Ion-beam modification of track membrane surface

✍ Scribed by V. A. Pronin; V. N. Gornov; A. V. Lipin; P. A. Loboda; B. V. Mchedlishvili; A. N. Nechaev; A. V. Sergeev

Book ID
110128565
Publisher
Springer
Year
2001
Tongue
English
Weight
51 KB
Volume
46
Category
Article
ISSN
1063-7842

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Ion beam modiÐcation of InSe (single crystals and molecular beam epitaxy-grown thin Ðlms on Si(111) substrate) by Ar' and O' (3 keV beam energy) is studied by XPS. The Ar' ion bombardment produces surface layer enrichment in metallic indium with a gradient of concentrations, i.e. the top surface lay