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Ion beam modification of structural and electrical properties of TiN thin films

✍ Scribed by M. Popović; M. Stojanović; D. Peruško; M. Novaković; I. Radović; V. Milinović; B. Timotijević; M. Mitrić; M. Milosavljević

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
199 KB
Volume
266
Category
Article
ISSN
0168-583X

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## Abstract CdSe films have been deposited on glass substrates at different substrate temperatures between room temperature and 300 °C. The films exhibited hexagonal structure with preferential orientation in the (002) direction. The crystallinity improved and the grain size increased with temperat