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Ion beam mixing in amorphous silicon I. Experimental investigation

✍ Scribed by S. Matteson; B.M. Paine; M.G. Grimaldi; G. Mezey; M.-A. Nicolet


Book ID
107833907
Publisher
Elsevier Science
Year
1981
Weight
661 KB
Volume
182-183
Category
Article
ISSN
0029-554X

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