Ion beam mixing and sputtering of Kr-irradiated TiN films measured with RBS, RNRA, and PIXE

✍ Scribed by T. Corts; W. Bolse; T. Osipowicz; K. P. Lieb

• Book ID: 104722416
• Publisher: Springer
• Year: 1990
• Tongue: English
• Weight: 706 KB
• Volume: 51
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf00324738