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Ion mixing in multilayer films and the doping of the near-surface layers of polycrystalline substrates under irradiation by ion beams with a wide energy spectrum

✍ Scribed by Kalin, B. A.; Volkov, N. V.; Oleinikov, I. V.


Book ID
115065043
Publisher
Allerton Press Inc
Year
2012
Tongue
English
Weight
235 KB
Volume
76
Category
Article
ISSN
1062-8738

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