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Ion beam mixing and room temperature silicidation of Cu/Si(1 1 1) system by Ar+ ion irradiation

✍ Scribed by D.K. Sarkar; S. Dhara; K.G.M. Nair; S. Chaudhury

No coin nor oath required. For personal study only.

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Ion beam mixing and room temperature silicidation of Cu/Si(1&#xa0;1&#xa0;1) system by Ar+ ion irradiation