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Epitaxial SiC formation induced by medium energy ions on Si(1 1 1) at room temperature

✍ Scribed by Praveen Kumar; Lekha Nair; Santanu Bera; B.R. Mehta; S.M. Shivaprasad

No coin nor oath required. For personal study only.

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Epitaxial SiC formation induced by medium energy ions on Si(1&#xa0;1&#xa0;1) at room temperature